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Atomic layer deposition : principles, characteristics, and nanotechnology applications 2nd ed

Atomic layer deposition : principles, characteristics, and nanotechnology applications 2nd ed (4회 대출)

자료유형
단행본
개인저자
Kaariainen, Tommi.
서명 / 저자사항
Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kaariainen ... [et al.].
판사항
2nd ed.
발행사항
Hoboken, New Jersey :   John Wiley & Sons,   2013.  
형태사항
xv, 253 p. : ill. ; 25 cm.
ISBN
9781118062777 (cloth : alk. paper)
서지주기
Includes bibliographical references and index.
일반주제명
Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology.
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020 ▼a 9781118062777 (cloth : alk. paper)
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040 ▼a DLC ▼b eng ▼c DLC ▼e rda ▼d DLC ▼d 211009
050 0 0 ▼a TS695 ▼b .K33 2013
082 0 0 ▼a 620/.5 ▼2 23
084 ▼a 620.5 ▼2 DDCK
090 ▼a 620.5 ▼b A881-2
245 0 0 ▼a Atomic layer deposition : ▼b principles, characteristics, and nanotechnology applications / ▼c Tommi Kaariainen ... [et al.].
250 ▼a 2nd ed.
260 ▼a Hoboken, New Jersey : ▼b John Wiley & Sons, ▼c 2013.
300 ▼a xv, 253 p. : ▼b ill. ; ▼c 25 cm.
504 ▼a Includes bibliographical references and index.
650 0 ▼a Chemical vapor deposition.
650 0 ▼a Epitaxy.
650 0 ▼a Microelectronics.
650 0 ▼a Nanotechnology.
700 1 ▼a Kaariainen, Tommi.
945 ▼a KLPA

소장정보

No. 소장처 청구기호 등록번호 도서상태 반납예정일 예약 서비스
No. 1 소장처 과학도서관/Sci-Info(2층서고)/ 청구기호 620.5 A881-2 등록번호 121225971 도서상태 대출가능 반납예정일 예약 서비스 B M

컨텐츠정보

목차

Acknowledgements ix

Foreword xi

Preface xiii

1 Fundamentals of Atomic Layer Deposition 1

1.1 Chemical Vapour Deposition 1

1.1.1 Thermal CVD 2

1.1.2 Plasma Enhanced CVD (PECVD) 5

1.2 Vapour Adsorption 6

1.3 Atomic Layer Deposition (ALD) 10

References 29

2 Elemental Semiconductor Epitaxial Films 33

2.1 Epitaxial Silicon 33

References 49

3 III-V Semiconductor Films 51

3.1 Gallium Arsenide 51

3.2 Other III-V Semiconductor Films 63

3.3 Applications 64

References 65

4 Oxide films 67

4.1 Introduction 67

4.2 Aluminum Oxide 68

4.3 Titanium Dioxide 81

4.4 Zinc Oxide 96

4.5 Zirconium Dioxide 101

4.6 Hafnium Dioxide 107

4.7 Other Oxides 112

4.8 Mixed Oxides and Nanolaminates 124

4.9 Multilayers 150

References 151

5 Nitrides and Other Compounds 161

5.1 Introduction 161

5.2 Nitrides 162

5.3 Chalcogenides 176

5.4 Other Compounds 179

References 179

6 Metals 183

6.1 Introduction 183

6.2 Noble Metals 184

6.3 Titanium 193

6.4 Tantalum 196

6.5 Aluminum 198

6.6 Copper 200

6.7 Other Transition Metals 203

References 204

7 Organic and Hybrid Materials 207

7.1 Introduction 207

7.2 Organic layers 208

7.3 Hybrid Organic-inorganic Layers. 209

7.4 Applications of Organic and Hybrid Films 212

References 213

8 ALD Applications and Industry 215

8.1 Introduction 215

8.2 MEMS/NEMS 217

8.3 Thin Film Magnetic Heads 223

8.4 Coating Nanoparticles, Nanomaterials and Porous Objects 224

8.5 Optical Coatings 226

8.6 Thin Film Electroluminescent Displays 228

8.7 Solar Cells 229

8.8 Anti-corrosion Layers 231

8.9 Opportunities in Organic Electronics 234

8.10 ALD Tool Manufacturers and Coating Providers 236

References 238

Index 243


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