CONTENTS
Preface to Series = ⅸ
Preface = ⅹ
Acronyms Glossary = xi
Contributors = xvi
INTRODUCTION AND SUMMARIES
1.0 Introduction = I
Technique Summaries = 7
IMAGINE TECHNIQUES (MICROSCOPY)
2.0 Introduction = 57
2.1 Light Microscopy = 60
2.2 Scanning Electron Microscopy, SEM = 70
2.3 Scanning Tunneling Microscopy and Scanning Force Microscopy, STM and SFM = 85
2.4 Transmission Electron Microscopy, TEM = 99
ELECTRON BEAM INSTRUMENTS
3.0 Introduction = 117
3.1 Energy-Dispersive X-Ray Spectroscopy, EDS = 120
3.2 Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope, EELS = 135
3.3 Cathodoluminescence, CL = 149
3.4 Scanning Transmission Electron Microscopy, STEM = 161
3.5 Electron Probe X-Ray Microanalysis, EPMA = 175
STRUCTURE DETER DETERMINATION BY DIFFRACTION AND SCATTERING
4.0 Introduction = 193
4.1 X-Ray Diffraction, XRD = 198
4.2 Extended X-Ray Absorption Fine Structure, EXAFS = 214
4.3 Surface Extended X-Ray Absorption Fine Structure and Near Edge X-Ray Absorption Fine Structure, SEXAFS/NEXAFS = 227
4.4 X-Ray Photoelectron and Auger Electron Diffraction, XPD and AED = 240
4.5 Low-Energy Electron Diffraction, LEED = 252
4.6 Reflection High-Energy Electron Diffraction, RHEED = 264
ELECTRON EMISSION SPECTRSCOPIES
5.0 Introduction = 279
5.1 X-Ray Photoelectron Spectroscopy, XPS = 282
5.2 Ultraviolet Photoelectron Spectroscopy, UPS = 300
5.3 Auger Electron Spectroscopy, AES = 310
5.4 Reflected Electron Energy-loss Spectroscopy, REELS = 324
X-RAy EMISSION TECHNIQUES
6.0 Introduction = 335
6.1 X-Ray Fluorescence, XBF = 338
6.2 Total Reflection X-Ray Fluorescence Analysis, TXRF = 349
6.3 Particle-Induced X-Ray Emission, PIXE = 357
VISIBLE／UV EMISSION, REFLECTION, AND ABSORPTION
7.0 Introduction = 371
7.1 Photoluminescence, PL = 373
7.2 Modulation Spectroscopy = 385
7.3 Variable Angle Spectroscopic Ellipsometry, VASE = 401
VIBRATIONAL SPECTROSCOPIES AND NMR
8.0 Introduction = 413
8.1 Fourier Transfor Infrared Spectroscopy, FTIR = 416
8.2 Raman Spectroscopy = 428
8.3 High-Resolution Electron Energy Loss Spectroscopy, HREELS = 442
8.4 Solid State Nuclear Magnetic Resonance, NMR = 460
ION SCATTERING TECHNIQUES
9.0 Introduction = 473
9.1 Rutherford Backscattering Spectrometry, RBS = 476
9.2 Elastic Recoil Spectrometry, ERS = 488
9.3 Medium-Energy Ion Scattering with Channeling and Blocking, MEIS = 502
9.4 Ion Scattering Spectroscopy, ISS = 514
MASS AND OPTICAL SPECTROSCOPIES
10.0 Introduction = 527
10.1 Dynamic Secondary Ion Mass Spectrometry, Dynamic SIMS = 532
10.2 Static Secondary ion Mass Spectrometry, Static SIMS = 549
10.3 Surface Analysis by Laser ionization, SALI = 559
10.4 Sputtered Neutral Mass Spectrometry, SNMS = 571
10.5 Laser ionization Mass Spectrometry, LIMS = 586
10.6 Spark Source Mass Spectrometry, SSMS = 598
10.7 Glow-Discharge Mass Spectrometry, GDMS = 609
10.8 Inductively Coupled Plasma Mass Spectrometry, ICPMS = 624
10.9 Inductively Coupled Plasma-Optical Emission Spectroscopy, ICP-OES = 633
NEUTRON AND NUCLEAR TECHNIQUES
11.0 Introduction = 645
11.1 Neutron Diffraction = 648
11.2 Neutron Reflectivity = 660
11.3 Neutron Activation Analysis, NAA = 671
11.4 Nuclear Reaction Analysis, NRA = 680
PHYSICAL AND MAGNETIC PROPERTIES
12.0 Introduction = 695
12.1 Surface Roughness : Measurement, Formation by Sputtering, Impact on Depth Profiling = 698
12.2 Optical Scatterometry = 711
12.3 Magneto-Optic Kerr Rotation, MOKE = 723
12.4 Physical and Chemical Adsorption Measurement of Solid Surface Areas = 736
Index = 745
